| Parameter | Unit | Specification |
| Scale | - | 5:1, 10:1 |
| Substrate material | - | Synthetic quartz or borosilicate glass (soda lime) |
| Size | mm | (127x127) ± 0,8 (5009) |
| Thickness | mm | 2,30 ± 0,10 |
| Type of anti-reflective coating | - | Chrome or anti-reflective chrome (AR) |
| Single Position Sealed Cleanroom Container | - | yes |
| Optical protective membranes (pellicles) | - | yes / no (agreed with the customer) |
| Pellicle type | - | ASM07P-122-1017HFLC 109,0x86,00x5,00 mm ; GCA04P-122-1017HFLC 97,50x97,50x6,05 mm ; or other |
| Minimum size per template | µm | 3,5 |
| Dimensional accuracy | µm | ± 1 / ± 0,5 |
| Registration Accuracy | µm | 0,35 |
| Homogeneity of critical dimensions | nm | no more than 100 |
| Inadmissible defect size | µm | 3,0 |
| Design | - | Photomasks design and preparation of control information based on initial topological information in OASIS, GDSII, DXF format |